The IMM-Rome has been derived by a former Research Unit called Project Sensors and Microsystems (CNR-PSM). Such a project officially begun on October 23, 1997. Personnel and Equipments were partially relocated from the former Institute for Solid State Electronics of CNR now IFN. The development of technologies and devices in the new area of the micro-electromechanical systems (MEMS), and the industrial oriented approach in solving problems for the short and medium term were the main aspects of this pioneering research management experiment. After the full re-organization of the CNR, the CNR-PSM was promoted to be a permanent structure, as a section of a new Institute which collects scientists and technologists from Microelectronics, Microsystems and Sensors areas. This new reality was called Institute for Microelectronics and Microsystems, shortly IMM, and it was approved and started officially on September 13, 2001.The location in Rome accounts for 17 units of permanent staff, including researchers, skilled technicians mainly dedicated to the clean room facilities and administrative personnel. 15 more units are currently involved as short term researchers, PhD students and associated researchers. By operating in synergy with the University of Rome "La Sapienza" and the University of RomeTor Vergata" on-the-job training is provided to several undergraduate and graduate students. "CNR-IMM-Rome has wide laboratory space. This is nearly equally split in clean rooms and characterization laboratory.