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FILM TRANSISTORS WITH VERY THIN PECVD a-SiO2 GATE

Type: 
Journal
Description: 
Publisher: 
Springer Science & Business Media
Publication date: 
6 Dec 2012
Authors: 

P Foglietti, G Fortunato, L Mariucci, C Reita

Biblio References: 
Volume: 222 Pages: 27
Origin: 
Crucial Issues in Semiconductor Materials and Processing Technologies
Link: 
https://scholar.google.it/citations

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