Type:
Journal
Description:
In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.
Publisher:
Springer-Verlag
Publication date:
1 Jun 2013
Biblio References:
Volume: 19 Pages: 845-851
Origin:
Microsystem technologies