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Type: 
Journal
Description: 
RF micromechanical switches are fabricated using dry releasing techniques. LTCC is used as substrate. Amorphous silicon, as an alternative sacrificial layer to silicon dioxide, has been used followed by dry plasma release. The silicon deposition has been optimized to obtain low mechanical stress and allowing thick sacrificial layer deposition. The use of amorphous silicon extends the flexibility of the design of the devices and of the packaging procedure.
Publisher: 
Elsevier
Publication date: 
1 May 2007
Authors: 

E Cianci, A Coppa, V Foglietti, M Dispenza, R Buttiglione, AM Fiorello, R Marcelli, S Catoni, D Pochesci

Biblio References: 
Volume: 84 Issue: 5-8 Pages: 1401-1404
Origin: 
Microelectronic engineering