Type:
Conference
Description:
In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability.
Publisher:
IEEE
Publication date:
11 Oct 2017
Biblio References:
Pages: 29-36
Origin:
2017 International Semiconductor Conference (CAS)