Type:
Journal
Description:
We developed a non self-aligned poly-silicon TFTs fabrication process at two different temperatures on spin-coated polyimide layer above Si-wafer. After TFTs fabrication, the polyimide layer was mechanically released from the Si-wafer and the devices characteristics were compared. In addition self-heating and hot-carrier induced instabilities were analysed.
Publisher:
The Korean Infomation Display Society
Publication date:
1 Jan 2007
Biblio References:
Pages: 261-264
Origin:
한국정보디스플레이학회: 학술대회논문집