SiO 2-HfO 2: Er 3+-Yb 3+ waveguide was prepared by multi-target rf-sputtering technique on silica substrate. The optical parameters were measured by an m-line apparatus operating at 543.5, 632.8, 1319 and 1542 nm. The structural properties were investigated with energy dispersive spectroscopy and Raman spectroscopy. The planar waveguide had a single-mode at 1.3 and 1.5 μm and an attenuation coefficient of 0.2 dB/cm at 1.5 pm was obtained. The 4 I 13/2→ 4 I 15/2 emission of Er 3+ ion transition with a 42 nm bandwidth and a lifetime of 4.6 ms was observed upon excitation in the TE 0 mode at 980 and 514.5 nm.