-A A +A
A single PZT metallic target has been utilized to deposit lead zirconate titanate (PZT) films by DC pulsed magnetron sputtering on Ti/Pt(111 )/Ti coated Si wafer and on Au coated glass fibers. Multicrystalline PZT films were obtained after post treatment by conventional (CA) and rapid thermal annealing (RTA) at 650degC in air and vacuum. The influences of both post-annealing treatments on the film properties were evaluated. Conventional annealed films showed a different texture orientation than RTA annealed films. It has been observed that conventional annealed films show higher remanent polarization and lesser coercive field than RTA annealed films. PZT films were also successfully deposited on Au coated glass fibers. Coated fibers were post annealed by RTA@600degC to obtain a PZT structure. Surface morphology of the films showed that the CA annealed films have denser grains and less crack …
Publication date: 
30 Jul 2006

Ratnesh Thapliyal, Aude Pellision, Dmitry Logvinovich, Martin Amberg, Hans Josef Hug, Giuseppino Fortunato

Biblio References: 
Pages: 336-339
2006 15th ieee international symposium on the applications of ferroelectrics