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SU-8 based processes for the realization of RF MEMS structures

Type: 
Journal
Description: 
Publisher: 
Publication date: 
1 Jan 2009
Authors: 

A Lucibello, G De Angelis, M Maiani, E Proietti, R Marcelli

Biblio References: 
Pages: 93-96
Origin: 
Proceedings 10th International Symposium on RF MEMS and RF Microsystems, Povo, Trento, Italy
Link: 
https://scholar.google.com/scholar

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