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In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed. The numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach. In particular, the contribution of resistive and inductive parasitic elements has been evaluated by using closed-form expressions. Configurations characterized by different technological solutions have been obtained and modeled. Simulations performed with the proposed approach correlate very well with actual measurements.
American Institute of Physics
Publication date: 
15 Oct 2008

Giancarlo Bartolucci, Romolo Marcelli, Simone Catoni, Benno Margesin, Flavio Giacomozzi, Viviana Mulloni, Paola Farinelli

Biblio References: 
Volume: 104 Issue: 8 Pages: 084514
Journal of Applied Physics