-A A +A
Type: 
Journal
Description: 
In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed. The numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach. In particular, the contribution of resistive and inductive parasitic elements has been evaluated by using closed-form expressions. Configurations characterized by different technological solutions have been obtained and modeled. Simulations performed with the proposed approach correlate very well with actual measurements.
Publisher: 
AIP
Publication date: 
15 Oct 2008
Authors: 

Giancarlo Bartolucci, Romolo Marcelli, Simone Catoni, Benno Margesin, Flavio Giacomozzi, Viviana Mulloni, Paola Farinelli

Biblio References: 
Volume: 104 Issue: 8 Pages: 084514
Origin: 
Journal of Applied Physics