S Catoni, S Di Nardo, Paola Farinelli, Flavio Giacomozzi, G Mannocchi, R Marcelli, Benno Margesin, Paolo Mezzanotte, Viviana Mulloni, R Sorrentino, F Vitulli, L Vietzorreck
Biblio references: Issue: 10 Pages: 95-102
Origin: MEMSWAVE2006 7th International Symposium on RF-MEMS and RF Microsystems