SiO2-HfO2: Er3+-Yb3+ waveguide was prepared by multi-target rf-sputtering technique on silica substrate. The optical parameters were measured by an m-line apparatus operating at 543.5, 632.8, 1319 and 1542 nm. The structural properties were investigated with energy dispersive spectroscopy and Raman spectroscopy. The planar waveguide had a single-mode at 1.3 and 1.5 mum and an attenuation coefficient of 0.2 dB/cm at 1.5 mum was obtained. The 4I13/2 rarr 4I15/2 emission of Er3+ ion transition with a 42 nm bandwidth and a lifetime of 4.6 ms was observed upon excitation in the TE0 mode at 980 and 514.5 nm. Photoluminescence (PL) excitation spectroscopy was used to obtain information about the effective excitation efficiency of Er3+ ions by co-doping with Yb3+ ions and the spectrum reported indicates that an effectual energy transfer from ytterbium to erbium ions is present. Additional work is …