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Type: 
Journal
Description: 
In this work we present a process to fabricate lowtemperature polysilicon (LTPS) TFTs on polyimide (PI) layers, spin-coated on Si-wafer used as rigid carrier. This process has been then used to fabricate elementary circuits as well as circuits for sensor applications.
Publisher: 
The Korean Infomation Display Society
Publication date: 
1 Jan 2009
Authors: 

G Fortunato, M Cuscunà, L Maiolo, F Maita, L Mariucci, A Minotti, A Pecora, D Simeone, A Valletta, A Bearzotti, A Macagnano, S Pantalei, E Zampetti

Biblio References: 
Pages: 258-261
Origin: 
한국정보디스플레이학회: 학술대회논문집