Type:
Journal
Description:
In this work we present a process to fabricate lowtemperature polysilicon (LTPS) TFTs on polyimide (PI) layers, spin-coated on Si-wafer used as rigid carrier. This process has been then used to fabricate elementary circuits as well as circuits for sensor applications.
Publisher:
The Korean Infomation Display Society
Publication date:
1 Jan 2009
Biblio References:
Pages: 258-261
Origin:
한국정보디스플레이학회: 학술대회논문집