Type:
Journal
Description:
Short channel effects have been investigated in n-channel polysilicon thin film transistors. Transconductance degradation has been observed when reducing the channel length L and this effect has been explained with the presence of a parasitic resistance related to residual implant damage. Threshold voltage slighlty decreases for channel length around L=1 μm and simulations confirm that the roll-off of the threshold voltage is expected for L
Publisher:
Elsevier
Publication date:
1 Sep 2005
Biblio References:
Volume: 487 Issue: 1-2 Pages: 221-226
Origin:
Thin Solid Films